The autonomous impact resonator: a new operation principle for a silicon resonant strain gauge
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1105-1108 vol.2
- https://doi.org/10.1109/sensor.1997.635393
Abstract
A new oscillation principle for silicon resonators is described. Using only a capacitive microbridge, a resistor and a d.c. source, an autonomous oscillator can be obtained without the need for an external oscillator circuit. An electromechanical model is derived and a general mathematical description is given. The behaviour of the autonomous impact oscillator is simulated and a stability analysis is presented. Experimental results validate the proposed oscillation mechanism.Keywords
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