Rare earth metal-SiO2-Si interfaces monitored by Auger spectroscopy
- 7 December 1992
- journal article
- Published by IOP Publishing in Journal of Physics: Condensed Matter
- Vol. 4 (49) , 9795-9802
- https://doi.org/10.1088/0953-8984/4/49/007
Abstract
The interfacial reactivity of the rare earth metals Yb and Pr deposited on ultra-thin layers of SiO2 on Si(111) substrates under UHV conditions is investigated using the Auger spectra of silicon, oxygen and the rare earth metals to monitor chemical changes. At room temperature exposure to approximately 10 AA of rare earth metal leads to reduction of the SiO2 to form rare earth oxide and rare earth silicide, while at elevated temperature reaction to form a silicate phase is demonstrated.Keywords
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