Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron Sputtering
- 1 July 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (7A) , L1199
- https://doi.org/10.1143/jjap.26.l1199
Abstract
Y-Ba-Cu-O thin films have been prepared on sapphire substrates by RF magnetron sputtering from sintered targets. The substrate temperature dependence of Ba and Cu concentrations against Y of as-sputtered films has been clarified. Film composition deviated from target composition. Cu concentration decreased significantly with increasing T s, while Ba concentration was independent of the substrate temperature. Using the CuO-compensated Y1Ba6Cu10O x target, assputtered high-T c films (T c onset=87 K, T c endpoint=40 K) have been successfully obtained as a T s of about 580°C.Keywords
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