Thin-film synthesis of the orthorhombic phase ofSnO2

Abstract
We demonstrate the formation of an SnO2 thin film in an orthorhombic phase which has previously been found in high-pressure experiments. Our starting point was the pulsed-laser deposition of an amorphous film of SnO on Si [001] substrates. During a series of subsequent heat treatments in air, the film crystallized in a sequence of three phases. First, after heating to 300°C, the litharge phase of SnO was formed. Next, while heating to 700°C, the film absorbed oxygen and formed the high-pressure orthorhombic phase of SnO2. Eventually, after heating to 1150°C, the film was fully converted to the stable cassiterite phase of SnO2. The experiments performed to date are not conclusive, but indirect evidence indicates that the litharge structure is important as an intermediary in the formation of the orthorhombic phase, in contrast to the transformation route at high pressure.