Control of slip in horizontal silicon epitaxy with profiled susceptors
- 31 December 1975
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 31, 308-311
- https://doi.org/10.1016/0022-0248(75)90145-1
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Slip in Silicon EpitaxyJournal of Applied Physics, 1972
- Low-frequency induction heating for crystal growingJournal of Crystal Growth, 1971
- Deformation of Single Crystal Wafers of Silicon Caused by LappingJapanese Journal of Applied Physics, 1971
- Influence of Silicon Slice Curvature on Thermally Induced StressesJournal of the Electrochemical Society, 1971