OYSTER, a 3D structural simulator for microelectromechanical design
- 13 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Shaping geometric objects by cumulative translational sweepsIBM Journal of Research and Development, 1987
- Solid modeling for production designIBM Journal of Research and Development, 1987
- OYSTER: A Study of Integrated Circuits as Three-Dimensional StructuresIBM Journal of Research and Development, 1983
- A Geometric Modeling System for Automated Mechanical AssemblyIBM Journal of Research and Development, 1980
- Models for computer simulation of complete IC fabrication processIEEE Journal of Solid-State Circuits, 1979