Ion projection lithography over wafer topography

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3547-3549
• https://doi.org/10.1116/1.587468

Abstract

Keywords

• WAFER TOPOGRAPHY
• ION PROJECTION LITHOGRAPHY
• LITHOGRAPHY OVER WAFER