Growth and characterization of tin oxide thin films prepared by reactive sputtering

• 30 November 1993
• journal article
• Published by Elsevier in Solar Energy Materials and Solar Cells
• Vol. 31  (2) , 235-242
• https://doi.org/10.1016/0927-0248(93)90054-7

Abstract

Keywords

• HEAT TREATMENT
• REACTIVE SPUTTERING
• EVOLUTION
• OPTICAL
• STRUCTURE
• FILMS
• ANNEALING