Interface charges beneath laser-annealed insulators on silicon
- 1 October 1980
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 23 (10) , 1037-1039
- https://doi.org/10.1016/0038-1101(80)90181-1
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Silicon-on-insulator m.o.s.f.e.t.s fabricated on laser-annealed polysilicon on SiO 2Electronics Letters, 1979
- cw laser anneal of polycrystalline silicon: Crystalline structure, electrical propertiesApplied Physics Letters, 1978