Polarization profile of RF-sputtered self-polarized PZT thin films

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Abstract
In this work, the laser-intensity-modulation method (LIMM) is applied for investigation of self-polarized sputtered Pb(Ti1−xZrx)O3 thin films. By means of spectroscopic ellipsometry the depth profile of refractive index was obtained. C-V measurements on samples of various thickness were performed to determine the interface capacitance and the space charge density. The work function of Pb(Ti1−xZrx)O3 surfaces was estimated by a modified Anderson method in an electron beam setup using graphite as a reference. The experimental results are discussed in terms of space charge formation and oxygen vacancy drift in the interface layer during thin film deposition. The influence of dipoles formed by intrinsic point defects on self-polarization is considered.