Evolution of sp2 bonding with deposition temperature in tetrahedral amorphous carbon studied by Raman spectroscopy
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- 8 March 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (11) , 1419-1421
- https://doi.org/10.1063/1.126050
Abstract
Two transitions in the bonding are found in tetrahedral amorphous carbon films as a function of deposition temperature. The total fraction shows a sharp decrease at a transition temperature of order 250 °C. In contrast, visible Raman finds that the sites show a gradual ordering into the graphitic clusters through the sharp bonding transition. The optical gap and resistivity show a similar, gradual transition. This indicates that the cluster size determines the optical gap, even when the content does not change. The Raman peak ratio is found to vary inversely with the square of the gap.
Keywords
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