Ultrahigh Vacuum Gauge Calibration
- 1 January 1968
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 5 (1) , 23-33
- https://doi.org/10.1116/1.1492572
Abstract
A study was made of the problems associated with the operation and calibration of vacuum gauges at pressures below 10−10 Torr, particularly the hot-cathode magnetron gauge developed by Lafferty. A liquid-He pumped metal vacuum system was used to attain base pressures of 1×10−13 Torr. Calibration pressures were generated by molecular flow through known conductances using a McLeod gauge as the pressure standard. Under proper operating conditions, the output of the hot-cathode magnetron showed no deviation from linearity down to the base pressure of the system. Calibration curves were also obtained for a General Electric cold-cathode gauge and a mass spectrometer.Keywords
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