Irradiation effects of gas-cluster CO2 ion beams on Si
- 1 April 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 74 (1-2) , 341-346
- https://doi.org/10.1016/0168-583x(93)95073-e
Abstract
No abstract availableKeywords
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- Optical Model for the Ellipsometric Characterization of Low Energy Ion Beam Damage in Single‐Crystal SiliconJournal of the Electrochemical Society, 1986
- Cluster Formation in Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size, and Test GasThe Journal of Chemical Physics, 1972