Resistivity of Doped Polycrystalline Silicon Films

• 1 January 1973
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 120  (1) , 145-146
• https://doi.org/10.1149/1.2403390

Abstract

Keywords

• RESISTIVITY
• POLYCRYSTALLINE SILICON FILMS
• DOPED POLYCRYSTALLINE SILICON