Highly Accurate Design of Spiral Inductors for MMIC's with Small Size and High Cut-Off Frequency Characteristics
- 23 March 2005
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
High precision experimental, theoretical procedures are presented for obtaining very compact inductors (diameter 80 to 200 µm) with values up to 5 nH, cut-off frequencies ranging from 20 to 100 GHz for L < 2 nH. The maximum phase and amplitude measurement error is of the order to +- 2 degrees and 1% respectively with typical measurement reproducibility of 0.1%. A new lumped element theory is presented predicting the electrical characteristics of spiral inductors with a maximum error of only 5%.Keywords
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