Study of silicon surfaces bombarded with noble gas ions in an electron cyclotron resonance plasma
- 15 October 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (8) , 5217-5224
- https://doi.org/10.1063/1.354261
Abstract
No abstract availableThis publication has 48 references indexed in Scilit:
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