Fabrication of gated silicon field-emission cathodes for vacuum microelectronics and electron-beam applications
- 1 March 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (2) , 454-458
- https://doi.org/10.1116/1.586883
Abstract
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