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Tribology Issues and Opportunities in MEMS
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Tribology Issues and Opportunities in MEMS
Tribology Issues and Opportunities in MEMS
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1 January 1998
book
Published by
Springer Nature
https://doi.org/10.1007/978-94-011-5050-7
Abstract
No abstract available
Keywords
MOTOR
POTENTIAL
SENSOR
INTEGRATED CIRCUIT
MACHINING
MANUFACTURING
MATERIALS SCIENCE
MICROELECTROMECHANICAL SYSTEM (MEMS)
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