6 nm half-pitch lines and 0.04 µm2static random access memory patterns by nanoimprint lithography
- 12 May 2005
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 16 (8) , 1058-1061
- https://doi.org/10.1088/0957-4484/16/8/010
Abstract
No abstract availableKeywords
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