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Reliability limits for the gate insulator in CMOS technology
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Reliability limits for the gate insulator in CMOS technology
Reliability limits for the gate insulator in CMOS technology
J. H. Stathis
J. H. Stathis
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1 March 2002
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 46
(2.3)
,
265-286
https://doi.org/10.1147/rd.462.0265
Abstract
No abstract available
Cited
Cited by 188 articles
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