Direct evidence for co-aggregation of carbon and oxygen in Czochralski silicon
- 15 October 1985
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 47 (8) , 794-796
- https://doi.org/10.1063/1.95985
Abstract
Direct evidence for the co-aggregation of oxygen and carbon is shown by secondary ion mass spectroscopy for a carbon-doped Czochralski silicon crystal subjected to a heat treatment at 1000 °C. In conjunction with infared absorption data, the carbon enhancement effect on oxygen precipitation at 1000 °C in high carbon silicon is explained with the catalytic effect of carbon in modifying the interfacial energy or the point defect ambient at the oxygen precipitate surface.Keywords
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