A CMOS front-end circuit for a capacitive pressure sensor
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 102-107
- https://doi.org/10.1016/0924-4247(90)85020-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A capacitive silicon pressure sensor with low TCO and high long-term stabilitySensors and Actuators A: Physical, 1990
- An integrated capacitive pressure sensor with frequency-modulated outputSensors and Actuators, 1986