Subcritical crack growth in silicon MEMS
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 8 (3) , 319-327
- https://doi.org/10.1109/84.788636
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Micromechanical fatigue testingExperimental Mechanics, 1993
- Microindentation for Fracture and Stress‐Corrosion Cracking Studies in Single‐Crystal SiliconJournal of the Electrochemical Society, 1987
- Slow Crack Growth Studies in SiliconPublished by Springer Nature ,1983
- The Fracture of Single‐Crystal Silicon Under Several Liquid EnvironmentsJournal of the American Ceramic Society, 1980