Spin-on Mesoporous Silica Films with Ultralow Dielectric Constants, Ordered Pore Structures, and Hydrophobic Surfaces
- 1 July 2001
- journal article
- Published by Wiley in Advanced Materials
- Vol. 13 (14) , 1099-1102
- https://doi.org/10.1002/1521-4095(200107)13:14<1099::aid-adma1099>3.0.co;2-0
Abstract
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