Schottky diodes and other devices on thin silicon membranes
- 1 June 1976
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 23 (6) , 579-583
- https://doi.org/10.1109/T-ED.1976.18455
Abstract
The fabrication of ultra-thin silicon membranes of micron or submicron sizes with thicker supporting frames makes possible improvements in several kinds of electronic devices. We show that the series resistances of some devices can be reduced significantly, thus effecting increases in the cutoff frequencies. The resistance swing of Schottky diodes can also be raised. Initial experimentation relating to some of these applications is presented.Keywords
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