Fabrication of Li2B4O7 Piezoelectric Thin Films

Publisher Website
Google Scholar
Abstract
Piezoelectric thin films of Li2B4O7 are fabricated by two methods, RF sputter deposition and vapor deposition under a low gas pressure. RF sputter deposition is found unsuitable because the sputtered Li2B4O7 tends to decompose during the process, c-axis oriented Li2B4O7 films with good piezoelectric characteristics, on the other hand, are prepared by vapor deposition under a low gas pressure.

This publication has 0 references indexed in Scilit: