An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate1Paper presented at the 2nd Asia Conference on Chemical Sensors, Xi'an, P.R. China, 1995.1
- 1 May 1998
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 46 (3) , 174-179
- https://doi.org/10.1016/s0925-4005(98)00118-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Micro-hotplate for thin film gas sensor: fabrication using cmos technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Thermal Analysis And Design Of A Micro-hotplate For Integrated Gas Sensor ApplicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993