Fabrication of microbridge Josephson junctions using electron beam lithography
- 1 January 1978
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 44 (1) , 298-311
- https://doi.org/10.1063/1.31355
Abstract
We describe the fabrication of microbridge Josephson junctions using a small research‐oriented electron beam lithography system. Data is presented on the dimensional dependence of the resistance and critical current of such junctions. Progress toward the development of large coherent arrays of these junctions and the potential properties of such arrays is discussed.Keywords
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