New Developments in Ion Beam Sputtering and Etching Techniques

• 1 January 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (S1)
• https://doi.org/10.7567/jjaps.2s1.509

Abstract

Keywords

• BEAM SPUTTERING
• ION BEAM
• ETCHING TECHNIQUES
• NEW DEVELOPMENTS