The chemistry of processes which create dielectric layers with functional group substituents on semiconductors by impurity thermo-oxidation
- 30 September 1991
- journal article
- Published by Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii in Russian Chemical Reviews
- Vol. 60 (9) , 967-979
- https://doi.org/10.1070/rc1991v060n09abeh001122
Abstract
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