On the Shape of the Au Depth Profile in Heat Treated Si Wafers
- 16 April 1989
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 112 (2) , K75-K80
- https://doi.org/10.1002/pssa.2211120260
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Diffusion of Gold in SiliconJournal of the Electrochemical Society, 1982
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- Diffusion Mechanisms and Point Defects in Silicon and GermaniumPhysica Status Solidi (b), 1968