The Epitaxial Growth of Silicon on Silicon Webs and Silicon Slices

• 1 January 1966
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 113  (7) , 717
• https://doi.org/10.1149/1.2424098

Abstract

Keywords

• WEBS AND SILICON
• EPITAXIAL GROWTH
• SILICON SLICES
• GROWTH OF SILICON
• SILICON ON SILICON