Role of negative ions in the RF plasma deposition of fluoropolymer films from perfluoropropane

• 1 June 1988
• journal article
• research article
• Published by Wiley in Journal of Polymer Science Part B: Polymer Physics
• Vol. 26  (6) , 1237-1249
• https://doi.org/10.1002/polb.1988.090260608

Abstract

Keywords

• FTIR
• PERFLUOROPROPANE
• DEPOSITED FLUOROPOLYMER FILMS
• SALTS
• IONIC
• SUBSTRATES