Imaging and Reconstruction for Rough Surface Scattering in the Kirchhoff Approximation by Confocal Microscopy
- 1 December 1993
- journal article
- research article
- Published by Taylor & Francis in Journal of Modern Optics
- Vol. 40 (12) , 2407-2421
- https://doi.org/10.1080/09500349314552431
Abstract
Imaging of rough surfaces in confocal microscopy can be described using the concept of the three-dimensional (3D) coherent transfer function (CTF), which is developed on the basis of the Kirchhoff approximation. The 3D CTF is presented using a scalar but high-angle theory. Methods for reconstruction of surface profiles are considered.Keywords
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