Nanopatterning of organic and inorganic materials by holographic lithography and plasma etching
- 30 June 2000
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 53 (1-4) , 391-394
- https://doi.org/10.1016/s0167-9317(00)00340-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Organic solid-state lasers with imprinted gratings on plastic substratesApplied Physics Letters, 1998
- Singlet Intrachain Exciton Generation and Decay in Poly(-phenylenevinylene)Physical Review Letters, 1996
- Photolithographic patterning of electroactive polymer films and electrochemically modulated optical diffraction gratingsAdvanced Materials, 1996
- Channel waveguides of insoluble conjugated polymersOptical Materials, 1995
- Chemical tuning of electroluminescent copolymers to improve emission efficiencies and allow patterningNature, 1992