Growth morphology determination in the initial stages of epitaxy by XPS

• 1 April 1984
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 2  (2) , 350-352
• https://doi.org/10.1116/1.572737

Abstract

Keywords

• GROWTH MORPHOLOGY DETERMINATION
• XPS
• INITIAL STAGES
• EPITAXY