Preparation of photoresist polymer by a photoreactive monomer containing N,N-diethyldithiocarbamate group
- 5 February 1988
- journal article
- research article
- Published by Wiley in Journal of Applied Polymer Science
- Vol. 35 (2) , 465-473
- https://doi.org/10.1002/app.1988.070350213
Abstract
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