CH3OH Concentration and Total Pressure Dependence of Diamond Films Formed from CH3OH-H2 Mixed Gas by Magnet-Active Microwave Plasma Chemical Vapor Deposition
- 1 July 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (7R)
- https://doi.org/10.1143/jjap.32.3231
Abstract
No abstract availableKeywords
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