Surface analysis of diffusion zones in multiple chemical vapor deposition coatings

• 1 November 1985
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 3  (6) , 2426-2431
• https://doi.org/10.1116/1.572851

Abstract

Keywords

• SCANNING ELECTRON MICROSCOPY
• X RAY PHOTOELECTRON SPECTROSCOPY
• CHEMICAL COMPOSITION
• SURFACE ANALYSIS
• NITROGEN