Measurement of Sidewall Roughness by Scanning Tunneling Microscope

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Abstract
A scanning tunneling microscope (STM) is a highly effective tool for observing a microfabricated pattern. However, it is difficult to measure sidewall roughness using a conventional STM because of the restriction of the tip shape and one-dimensional servo system. The main objective of this study is to develop a sidewall roughness characterization tool. The electron-beam deposition method is applied to preparing a novel STM tip shape. A two-dimensional servo system, with a subnano-vibration mode to provide vibrations below 1 nm for x- and z-directions to a tip during scanning, has been developed for sidewall roughness measurement.