Introduction to the ESEM instrument
- 1 August 1993
- journal article
- review article
- Published by Wiley in Microscopy Research and Technique
- Vol. 25 (5-6) , 354-361
- https://doi.org/10.1002/jemt.1070250503
Abstract
An outline is presented of the first commercial environmental scanning electron microscope (ESEM). A concise description of this instrument and its operation, from a user's perspective, is given. More specifically, the description includes the electron optics, pressure stages and control, detection modes, resolution, and ancillary equipment.Keywords
This publication has 2 references indexed in Scilit:
- Review and outline of environmental SEM at presentJournal of Microscopy, 1991
- Theory of the Gaseous Detector Device in the Environmental Scanning Electron MicroscopePublished by Elsevier ,1990