Improved ``Tuning'' of Ion Microprobes Using Scandium Thin Film Targets
- 1 April 1972
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 43 (4) , 654-655
- https://doi.org/10.1063/1.1685715
Abstract
The optical sensitivity of thin film scandium metal to energetic ions is used to observe and record the position, shape, and size of the primary beam of an ion microprobe during the beam tuning process. The tuning sample is also useful as an in situ gauge of the relative sputtering rate for various beam types and energies.Keywords
This publication has 5 references indexed in Scilit:
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- Analysis of thin films by ion microprobe mass spectrometryAnalytical Chemistry, 1970
- Analytic methods for the ion microprobe mass analyzer. Part II.International Journal of Mass Spectrometry and Ion Physics, 1970
- The microanalysis of surfaces by scanning with charged particle beamsNuclear Instruments and Methods, 1969
- Ion Microprobe Mass AnalyzerJournal of Applied Physics, 1967