Summary Abstract: Laser-induced chemical etching of metals and semiconductors

• 1 March 1982
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 20  (3) , 790-791
• https://doi.org/10.1116/1.571484

Abstract

Keywords

• SUMMARY ABSTRACT
• INDUCED CHEMICAL
• CHEMICAL ETCHING
• SEMICONDUCTORS
• METALS
• LASER INDUCED