Growth of diamond at room temperature by an ion-beam sputter deposition under hydrogen-ion bombardment
- 15 August 1985
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 58 (4) , 1693-1695
- https://doi.org/10.1063/1.336066
Abstract
The structure and crystal phase of carbon films prepared by an ion-beam sputter deposition were studied. The properties of the deposited carbon films were influenced by a hydrogen-ion bombardment during the film growth. It is noted that the hydrogen-ion bombardment activates the growth of diamond in the deposited carbon film. Diamond particles of 0.1∼1 μm in diameter, which showed well-defined morphology of diamond, were successfully grown at room temperature on nondiamond substrates.This publication has 9 references indexed in Scilit:
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