The relation between lift-off of photoresist and the surface coverage of trimethylsiloxy groups on silicon wafers: A quantitative time-of-flight secondary ion mass spectrometry and contact angle study
- 1 May 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 8 (3) , 463-466
- https://doi.org/10.1116/1.585045
Abstract
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