Laser-Induced Forward Transfer Of Metal Oxides To Trim The Frequency Of Surface Acoustic Wave Resonator Devices

16 December 1988

proceedings article
Published by SPIE-Intl Soc Optical Eng

Vol. 0998, 113-125
https://doi.org/10.1117/12.960218

Abstract

The frequencies of surface acoustic wave resonators (SAWRs) sealed in novel all quartz packages have been accurately set using laser-induced forward transfer (LIFT) of aluminum-oxide thin films. This technique allows accurate frequency adjustment of SAWRs over -40 parts per million (PPM) with a resolution of better than ±1 PPM. This technique does not significantly degrade relevant electrical SAWR device characteristics and provides the user with substantial cost and time savings when setting a SAWR oscillator to frequency. However, some degradation in the long-term stability of oscillators driven by laser-trimmed SAWR devices has been measured. The quality of the LIFT-deposited oxide film plays an important role in both the frequency sensitivity and long-term stability of laser-trimmed SAWR devices.

Keywords

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