Miniature 250 μm Thick Fuel Cell with Monolithically Fabricated Silicon Electrodes
- 1 January 2004
- journal article
- Published by The Electrochemical Society in Electrochemical and Solid-State Letters
- Vol. 7 (8) , A231-A234
- https://doi.org/10.1149/1.1756859
Abstract
A fabrication technique of miniature fuel cell electrodes was developed from Si wafers. The fuel channels, porous layer, and catalyst layer were formed in the Si wafer. The fuel channels were fabricated by photolithographic patterning and subsequent wet etching on the Si. The porous layer was formed by anodization of Si from the polymer electrolyte membrane side through the bottom of the fuel channels. Catalyst metals were deposited inside the porous layer by wet plating. The two electrodes were hot-pressed with a Nafion 112 sheet. Open-circuit voltage of 840 mV and maximum power density of were observed by hydrogen feed. © 2004 The Electrochemical Society. All rights reserved.Keywords
This publication has 16 references indexed in Scilit:
- Fabrication of miniature silicon wafer fuel cells with improved performanceJournal of Power Sources, 2003
- Novel microfabrication approaches for directly patterning PEM fuel cell membranesJournal of Power Sources, 2003
- Microfabricated fuel cellsElectrochimica Acta, 2003
- Design and fabrication of a micro fuel cell array with “flip-flop” interconnectionJournal of Power Sources, 2002
- Design considerations for miniaturized PEM fuel cellsJournal of Power Sources, 2002
- Electrochemistry of SiliconPublished by Wiley ,2002
- Novel proton exchange membrane thin-film fuel cell for microscale energy conversionJournal of Vacuum Science & Technology A, 2000
- On the morphology and the electrochemical formation mechanism of mesoporous siliconMaterials Science and Engineering: B, 2000
- A Miniature Methanol/Air Polymer Electrolyte Fuel CellElectrochemical and Solid-State Letters, 1999
- Novel preparation of noble metal nanostructures utilizing porous siliconSolid State Communications, 1998