Small-size vacuum sensors based on silicon thermopiles
- 31 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3) , 565-569
- https://doi.org/10.1016/0924-4247(91)87052-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Integrated thermopile sensorsSensors and Actuators A: Physical, 1990
- Performance of integrated thermopile vacuum sensorsJournal of Physics E: Scientific Instruments, 1988