KrF excimer laser dry and steam cleaning of silicon surfaces with metallic particulate contaminants

• 1 February 2002
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 74  (2) , 191-199
• https://doi.org/10.1007/s003390100868

Abstract

Keywords

• PACS: 81.65.CF
• 79.60.BM