Fabrication of Sr2Nb2O7 thin films by sol-gel processing
- 3 March 1995
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 10 (3) , 704-707
- https://doi.org/10.1557/jmr.1995.0704
Abstract
Sol-gel Sr2Nb2O7 thin films were deposited on Si(100) and Pt-coated Si substrates for the first time by spin-coating. The Sr2Nb2O7 precursor solution was prepared from strontium metal dissolved in 2-methoxyethanol, acetylacetone, and niobium ethoxide. The formation of phase pure Sr2Nb2O7 occurred via an intermediate perovskite phase of composition close to Sr0.82NbO3. Crack-free Sr2Nb2O7 films of ∼0.4 μm thickness were deposited on these substrates using a single-coating followed by heat treatment at 850 °C for 12 h. SEM microstructure and thin film XRD results indicated the deposition of a grain-oriented film on the Pt-coated Si substrate. The room temperature dielectric constant and the loss values of the film measured at 10 kHz are 45 and 0.045, respectively.Keywords
This publication has 13 references indexed in Scilit:
- Sol-gel synthesis of Ln2(Ln = La, Nd)Ti2O7Journal of Materials Research, 1992
- Sol–Gel Synthesis of Strontium Pyroniobate and Calcium PyroniobateJournal of the American Ceramic Society, 1992
- Fabrication of La2Ti2O7thin films by a sol-gel techniqueFerroelectrics Letters Section, 1992
- Sol–Gel Fabrication of Epitaxial and Oriented TiO2 Thin FilmsJournal of the American Ceramic Society, 1992
- Microwave dielectric properties of layered perovskite A2B2O7 single-crystal fibersMaterials Letters, 1991
- High-resolution electron microscopy of the incommensurate structure in Sr2Nb2O2Acta Crystallographica Section A, 1982
- Single-crystal Sr2Nb2O7 film optical waveguide deposited by rf sputteringApplied Physics Letters, 1976
- The crystal structure of Sr2Nb2O7, a compound with perovskite-type slabsActa Crystallographica Section B: Structural Science, Crystal Engineering and Materials, 1975
- Ferroelectric, Electrooptic and Piezoelectric Properties of Nd2Ti2O7Single CrystalJapanese Journal of Applied Physics, 1974
- A new ferroelectric: La2Ti2o7Ferroelectrics, 1974